Planar micro-supercapacitor fabrication using laser-based approach to meet the growing energy demands of miniaturized electronics

https://www.eurekalert.org/news-releases/1115272

"Spatial Light Modulation-assisted Femtosecond Laser Plasma Lithography: orders of magnitude faster processing speeds than conventional laser direct writing, in-situ electrode/ sub-wavelength micro/ nanograting structure simultaneous fabrication, programmable, scalable, works with various materials including: graphene oxide, MXene, COFs... electrodes with laser-etched gratings perform better than those smooth unstructured... 4.3X increased volumetric capacitance... retains 93% capacity after 5K cycles"

Related: Deep-nanohole-clad waveguides with up to 50K:1 depth-to-diameter ratio in single crystals via femtosecond laser writing
https://www.light-am.com/article/doi/10.37188/lam.2026.040