Optimizing electronics' insulating layers (dielectrics) during fabrication (atomic layer deposition), swapping ozone for water

https://techxplore.com/news/2026-01-ultrathin-coating-electronics-miracle-insulator.html

"leakage not due to pinholes/ cracks, but chemistry: depositing aluminum oxide on top of titanium oxide, top layer steals oxygen from underlying layer, enabling quantum tunneling to allow electrons to leak through layers too thin the be effective barriers so they become incomplete/ leaky... stronger oxygen source immediately replaces any oxygen lost during reaction, allowing complete barrier formation even at <1 nm thickness"