MetaLitho3D nanofabrication platform scales 2-photon lithography from a slow laboratory process to a high-speed, wafer-scale manufacturing tool

https://phys.org/news/2025-12-team-shatters-3d-nanofabrication-limits.html

">120K metalense array (ultrathin optical elements) splits single laser into thousands of coordinated focal spots... prints across cm-scale areas simultaneously rather than point-by-point... throughput 1,000X faster while maintaining sub-μm precision, feature sizes as small as 113 nm... spatial light modulator enables real-time intensity control of each individual beam... prints non-periodic, complex, stochastic structures (like 16 chess openings at once), quantum computing, fuel capsules (fusion energy), biomedicine, microelectronics"

Related: Goodbye stereolithography: Scientists develop a faster and finer way to 3d print metal
https://www.eurekalert.org/news-releases/1110463