Lithography called Beyond Extreme UV using new metal/ coating combinations, enables smaller, faster and affordable microchips

https://www.eurekalert.org/news-releases/1097886

"new methods/ materials for making... irradiate/ imprint materials quickly/ precisely using higher-powered lasers does not allow radiation-sensitive resist coating to work on silicon wafer with <10 nm patterns... overcome using imidazole coating: new class of resist zinc-organics allowing such imprints... adjusting UV frequency/ intensity, metal, imidazole changes light absorption efficiency... at least 10 different metals, hundreds of organics... commercial within 10 years”