Pulsed power modulator: inclined waveforms for compact/ precise processing, stepped mode generates shapes for semiconductor fabrication

https://techxplore.com/news/2025-09-tailored-pulsed-power-modulator-bias.html

"applies voltage pulling ions within plasma making them collide with semiconductor wafer, enabling etching, removing contaminants, deposition... stores energy at low power over long period, discharging instantaneously at high power controlling etching's depth/ narrowness... bias supplying pulses stably controlled within 2.5 µs duration, discharged at 400 kHz frequency... soft switching reduces power loss >78%... smaller power supplies, higher power density, longer lifespan... addresses heat generation"