Compact, solid-state laser generates 193-nm deep UV coherent vortex advancing semiconductor lithography and more

https://www.eurekalert.org/news-releases/1077709

"reduced power consumption... 6 kHz repetition rate, utilizes homemade Yb:YAG crystal amplifier producing 1030-nm laser divided into: 4th-harmonic generation of 258-nm laser with 1.2W output power, and parametric amplifier is pumped generating 1553-nm laser with 700mW power... combined in cascaded lithium triborate crystals producing 193-nm laser with 70mW power, <880 MHz linewidth... generates vortex beam carrying orbital angular momentum... spectroscopy, material processing, quantum technology"