High-quality nanomechanical triangline resonators with built-in piezoelectricity could further quantum sensing

https://www.eurekalert.org/news-releases/1063641

"μm/ nm -scale aluminum nitride mechanical resonators oscillate at much higher frequencies for long times without losing energy., sensing minuscule forces/ mass changes... tensile-stressed (1GPa) 295 nm silicon nitride with functional material on top, maintaining dissipation dilution boost mechanical factor >10 million... direct readout in sensing applications, also interfacing mechanical/ electric degrees of freedom for quantum information transduction... maintains single quantum coherent oscillation at room temperature"