Constructing large ordered arrays of single dopant atoms in a silicon chip, that could form the basis of a robust quantum computer

https://pursuit.unimelb.edu.au/articles/from-sand-to-superposition-a-key-step-towards-a-powerful-silicon-quantum-computer

"modifying method creating large single atom arrays in silicon chip, using microwaves/ laser beams manipulating qubits, even putting into superposition... standard silicon fabrication... equip silicon chips with tiny surface electrodes registers implantation of single atom from electric signal it creates when sopping in chip.... scalable physical qubits, including antimony, bismuth, germanium arrays in silicon... implant closely spaced antimony atom pairs controlled by multi-qubit-gate-operation"