Researchers achieve unprecedented nanostructuring inside silicon

https://phys.org/news/2024-07-unprecedented-nanostructuring-silicon.html

"traditionally limited to surface-level nanofabrication, limited by µm-scale resolution of laser lithography within silicon... challenges: complex optical effects within wafer and laser diffraction limit... laser pulse spatial light modulation: non-diffracting beam overcomes optical scattering hindering precise energy deposition, inducing voids... feature sizes down to 100 nm, order magnitude better... spatially-modulated laser pulses... nanoscale control over alignment/ symmetry... electronics, photovoltaics, photonics"