A low-cost microscope projection photolithography system for high-resolution fabrication

https://phys.org/news/2023-11-low-cost-microscope-photolithography-high-resolution-fabrication.html

"user-friendly fabrication... UV-LED-based microscope projection photolithography (MPP), for rapid high-resolution manufacturing of optical elements within seconds... low-cost 365 nm wavelength UV-LED light source... structure design, printing on transparent foil, pattern transfer onto chromium photomask, and subsequent wet-etching process... high-resolution optical elements down to 85 nm... MEMS consumer electronic, biosensor, microfluidic, biomedical and other optical devices"

Related: AI technique 'decodes' microscope images, overcoming fundamental limit
https://phys.org/news/2024-02-ai-technique-decodes-microscope-images.html








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