Team develops silicon photonic MEMS compatible with semiconductor manufacturing

https://phys.org/news/2023-03-team-silicon-photonic-mems-compatible.html

"combine optics and micro-electro mechanical systems (MEMS) in microchip... fast, support broad range of optical carrier signals and have low optical loss... nano-electro-mechanical actuators integrated in standard silicon photonics... energy-efficient fiber-optical communications, sensors (including gas sensors for precision air quality measurement), beam steering for LIDAR 3D sensing, programmable photonic chips, information processing in quantum photonics. micro-3D cameras, mobile phones"

Related: Scientists develop composite accelerometer for extreme environments

https://phys.org/news/2024-04-scientists-composite-accelerometer-extreme-environments.html