Silicon photonic MEMS designed for compatibility with semiconductor manufacturing

https://www.laserfocusworld.com/optics/article/14290918/silicon-photonic-mems-designed-for-compatibility-with-semiconductor-manufacturing

"energy-efficient, scalable for telecom and datacom, beam-steering for LiDAR 3D sensing... control flow of light on chip by mechanical movement of waveguide—only half micrometer width—with nm precision... photonic MEMS modulating amplitude, phase, direction, or to select channels of spectrum of optical signal on a chip... a wafer can host millions individually movable waveguide devices... expect response time >10X faster, and further footprint reduction; new class devices in mobile phones"

Related: Monolithically integrated semiconductor lasers with silicon photonic circuits
https://phys.org/news/2023-06-monolithically-semiconductor-lasers-silicon-photonic.html