Electron shower magnetron sputtering method for piezoelectric thin films allows low temperature production on insulating substrates

https://phys.org/news/2025-06-electron-shower-technique-advanced-piezoelectric.html#google_vignette

"Synchronized Floating Potential HiPIMS: argon ions ignited, then shot in short, high‑energy pulses at aluminum nitride, knocking out atoms subsequently landing on substrate, forming thin film... applying voltage to substrate accelerates film‑forming target ions, but also process gas argon ions, causing electrical breakdown, overcome having electrons reach target faster than much larger ions, so that only the right ions end up in the thin film... RF filters, sensors, actuators, tiny energy converters, future: quantum"