Tool measures plasma source and color of light simultaneously to improve lithography machines for smaller, faster microchips

https://phys.org/news/2023-09-tool-plasma-source-simultaneously-microchip.html

"For this new tool, the researchers used a combination of tapered zone plates and transmission grating. Both were produced at MESA+. Tapered zone plates are specialized optical components that manipulate extreme ultraviolet light to precisely image the plasma source. The transmission grating disperses the light into its individual colors, making it possible to individually measure them"