Novel composition/ processing of transparent plasma-resistant high-entropy ceramics extends life of semiconductor etching equipment

https://techxplore.com/news/2025-02-transparent-ceramics-life-semiconductor-etching.html

"reduces particle contamination... overcomes frequent conventional ceramic component replacement... inorganic dense bodied, high-density solid-state materials sintered, becoming transparent ceramics with 99.9% density, transmitting visible/ IR by controlling porosity... High-entropy ceramics don't generate impurities, have high heat resistance, excellent wear resistance, low thermal conductivity, as well as plasma resistance... low etch rate: fewer contamination particles... advances localization of components"

Related: Researchers make progress in high-temperature thermally sensitive ceramics
https://phys.org/news/2025-02-high-temperature-thermally-sensitive-ceramics.html