Innovative extreme UV lithography dramatically benefits semiconductor manufacturing

https://techxplore.com/news/2024-07-extreme-ultraviolet-lithography-technology-benefits.html

"smaller light sources, reducing costs, improving reliability/ lifespan, consumes >90% less power... optical projection system of 2 (instead of 10) mirrors... efficiently directs light onto logic patterns on flat mirror (the photomask) without blocking optical path... 2 light sources symmetrically positioned/ illuminate mask at same angle, on average mask illuminated from front, minimizing mask 3D effects... filed patent application"