Laser manufacturing of spatial resolution approaching quantum limit

https://phys.org/news/2024-02-laser-spatial-resolution-approaching-quantum.html

"higher manufacturing spatial resolution (<5 nm ~ λ/100, beyond optical diffraction- reaching quantum- limit... , approaching quantum limit, are realized... near unity yield fabrication single photon sources with high positional accuracy and minimal damage to lattice... high: brightness (10 million photons/ second), emission purity, stability... threshold tracking and lock-in (TTL): additional laser pulses (probe light) track any atomic scale damage under initial pulse (fabricating light)"