Novel method for producing thin metasurfaces with a diameter of almost 30 centimeters

 https://phys.org/news/2023-06-method-thin-metasurfaces-diameter-centimeters.html

"electron beam lithography character writing strategy projection... pattern divided smaller units. An electron beam create each of these small patterns on surface, fabrication of complex structures with high precision and efficiency... character projection high resolution of electron beam lithography and large element area without exposure time exploding... micro- and nano-optical structures on large areas, small optics in smartphones, high-resolution spectroscopy or computer-generated holograms"