Large-scale plasma etching technology for mass production of next-generation 2D semiconductors
https://techxplore.com/news/2023-06-large-scale-plasma-etching-technology-mass.html
"4-inch uniform defect-free plasma etching... molybdenum disulfide... plasma-based reactive ion etcher... stably control electron movement without tunneling... next-generation 2D semiconductor industry in the non-memory sector to find a new breakthrough in the future"
Related: Researchers may have solved the 'mirror twins' defect plaguing the next generation of 2D semiconductors
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