Electromechanical resonators operating at sub-terahertz frequencies

https://techxplore.com/news/2023-04-electromechanical-resonators-sub-terahertz-frequencies.html

"communication speed and efficiency... millimeter-wave dual rail resonator placed on top of suspended lithium niobate beam by chemically etched away silicon dioxide underneath minimizing loss of acoustic waves... millimeter-wave dual rail resonator... lithium niobate widely employed for semiconductors facilitate large-scale fabrication... frequencies between 95 GHz and 3 THz resilient to thermal fluctuations than GHz resonators... reach quantum ground state at accessible Kelvin temperatures"

Related: Nanoelectromechanical resonators based on hafnia–zirconia–alumina superlattices with gigahertz spectrum coverage

https://phys.org/news/2023-08-nanoelectromechanical-resonators-based-hafniazirconiaalumina-superlattices.html