Wafer-scale nanofabrication of telecom single-photon emitters in silicon

https://phys.org/news/2023-02-wafer-scale-nanofabrication-telecom-single-photon-emitters.html

"focused ion beams from liquid metal alloy ion sources place single-photon emitters at desired positions on wafer, obtaining high creation yield and spectral quality... After cooling-down and warming-up cycles did not observe degradation of optical properties... implemented broad-beam implantation in commercial implanter through lithographically defined mask... create dozens of telecom single-photon emitters at predefined locations with spatial accuracy 50 nm. They emit O-band and exhibit stable operation"