Etching method improves performance and lowers power consumption of circuits used in smartphones and data centers

https://techxplore.com/news/2023-02-etching-method-smartphone-circuit.html

"combines selectivity of wet with controllability of dry etching... dry etching metal carbides uses floating wire-assisted vapor plasma of argon gas mixed with vapor sources of ammonium hydroxide-based mixtures at medium pressure... adding energy so additional floating wire enhances generation high-density plasma... treated TiAlC surface can be removed after surface modifications... Atmospheric and medium pressure plasma techniques miniaturize equipment size, fabrication cost, and energy consumption"