The successful integration of a sub-0.5nm dielectric with 2D semiconductors

https://techxplore.com/news/2022-10-successful-sub-05nm-dielectric-2d-semiconductors.html

"integration sub-0.5-nm-EOT dielectrics in top-gated 2D transistors...integration with sub-0.5-nm-EOT ultrathin high-κ dielectric, has been overcome... integrating 2D semiconductors with high-k dielectrics. In the future, the material that they created and the method introduced in their paper could be used to create smaller and highly-performing FETs that are not adversely impacted by short-channel effects"