New cleaning technique boosts electronic and photonic prospects of aluminum nitride

https://phys.org/news/2022-10-technique-boosts-electronic-photonic-prospects.html

"developed aluminum-assisted surface cleaning removes impurities from substrates enables maintain nitrogen polarity... epitaxial growth nitrogen-polar aluminum nitride smooth surface morphology and high structural and optical quality... Thermally stable aluminum oxide present on aluminum nitride wafer surface reacts with aluminum and converts to volatile form... oxide-free wafer surface epitaxial growth... nitrogen-polar electronic devices... outperform metal-polar counterparts"