High-quality superconducting qubits fabricated with CMOS-compatible technologies

https://phys.org/news/2022-08-high-quality-superconducting-qubits-fabricated-cmos-compatible.html

"superconducting qubits with coherence times exceeding 100 µs... single-qubit gate fidelity 99.94%... sputtering deposition and subtractive etch. These breakthrough results could be achieved by improving the known process for making the overlap junctions. The improvements include process optimization to reduce the number of process steps and interfaces (and hence, the risk for energy losses), an improved Ar-milling step, and the exclusive use of aluminum (Al) for making the electrodes"