Helium-ion-beam nanofabrication: Extreme processes and applications

https://phys.org/news/2022-07-helium-ion-beam-nanofabrication-extreme-applications.html

"extreme nanofabrication, nanometer-scale nanopores beneficial single base recognition of DNA/RNA sequences fabricated by HIB milling on thinned silicon nitride membrane or suspended graphene. Amorphization... formation of specific 3D nanopores... nano-optics and bioscience applications... HIB direct writing without resist-assisted... sub-10-nm nanochannels, nanoribbons, and nanostructures for nanoscale functional devices... collision between helium ions and probe substrate... lower sputtering yield"